CF4, Tetrafluoromethane, R-14 Specialty Gas
CF4, Tetrafluoromethane is used with oxygen to etch polysilicon, silicon dioxide, and silicon nitride.[/caption]CF4, Tetrafluoromethane is used with oxygen to etch polysilicon, silicon dioxide, and silicon nitride. It is relatively inert under normal conditions and is an oxygen displacer. Concorde provides a high purity tetrafluoromethane gas resulting in a superior and more refined control of the etching process, resulting in better dimensional and profile control.
The presence of impurities such as halocarbons, as well as the presence of nitrogen or oxygen, can be detrimental to the control of the anisotropic etch. Under RF plasma conditions, the fluoride-free radicals are typically in the form of CF3 or CF2.
CF4 Safety Requirements
Safety Requirements: The cryogenic liquid will rapidly boil to the gas at standard temperatures and pressures. The liquefied gas can cause frostbite to any contaminated tissue. The main health hazard of releasing this gas is asphyxiation by oxygen displacement (see SDS for further information).
99.2% CF4 Commerical Grade:
|
CF4 Commercial Grade Maximum Impurities |
|
|
Tetrafluoromethane |
99.2% |
|
Nitrogen + Oxygen |
0.7% |
|
Hexafluoroethane + Carbon Dioxide |
0.1% |
|
Mass Content of Water |
< 1 ppm |
|
Acidity |
< 0.1 ppmw |
99.99% CF4 High Purity Grade:
|
CF4 High Purity Grade Maximum Impurities
|
|
|
Tetrafluoromethane
|
> 99.99%
|
|
Oxygen
|
< 5 ppm
|
|
Nitrogen
|
< 10 ppm
|
|
Carbon Dioxide + Carbon Monoxide
|
< 2 ppm
|
|
Other Halocarbons
|
< 2 ppm
|
|
Sulfur Hexafluoride
|
< 1 ppm
|
|
Moisture
|
< 2 ppm
|
|
Acidity (as Hydrogen Fluoride)
|
< 0.1 ppmw
|
|
Cylinder Specifications |
Contents |
Pressure |
||
|
Cylinder |
Valve Outlet |
Pounds |
PSIG |
BAR |
|
40 cf. |
CGA 580 |
12 lb. |
2000 |
139 |
|
80 cf. |
CGA 580 |
25 lb. |
2000 |
139 |
|
220 cf. |
CGA580 |
70 lb. |
2000 |
139 |
99.999% CF4 Superior Purity Grade:
|
CF4 High Purity Grade Maximum Impurities
|
|
|
Tetrafluoromethane
|
> 99.999%
|
|
Oxygen + Argon
|
< 1 ppm
|
|
Nitrogen
|
< 4 ppm
|
|
Carbon Dioxide + Carbon Monoxide
|
< 1 ppm
|
|
Other Halocarbons
|
< 2 ppm
|
|
Sulfur Hexafluoride
|
< 1 ppm
|
|
Moisture
|
< 1 ppm
|
|
Acidity (as Hydrogen Fluoride)
|
< 0.1 ppmw
|
Appearance, Safety Requirements:
A compressed, colorless gas, non-flammable, non-explosive, has a moderate general toxic action in inhalation contact.
|
CF4 Physical Constants |
|
|
Chemical formula |
CF4 |
|
Molecular Weight |
80.005 |
|
Specific volume @ +70°F (+21.1°C) |
4.396 ft³/lb., 0274 m³/kg |
|
Critical pressure |
542.3. psia, 37.39 bar |
|
Critical temperature |
-50.17°F, -45.65°C |
|
Specific gravity @ 70°F, 1 atm (Air=1) |
3.04 |
|
Hazardous Class |
2.2 |
|
Label |
Nonflammable Gas |
|
General Description |
Colorless, Odorless |
Downloads
Variety of Sizes in stock and ready for shipment:
5LB, 11LB, 18LB, 20LB, 25LB, 27.5LB, 35LB, 38LB, 45LB, 50LB, 57LB, 70LB, 90LB, 115LB and 1150LB. Custom Fill available upon request.
5KG, 10KG, 12.5KG, 40KG and 50KG. Custom Fill available upon request.
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