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CF4, Tetrafluoromethane, R-14 Specialty Gas

Carbon Tetrafluoromethane (CF4, R-14) is a low temperature refridgerant and is also used in a variety of wafer etch processes. Tetrafluoromethane is used with oxygen to etch polysilicon, silicon dioxide, and silicon nitride. It is relatively inert under normal conditions and is a oxygen displacer. Concorde provides a high purity tetrafluoromethane gas resulting in a superior and more refined control of the etching process, this then results in better dimensional and profile control.

The presence of impurities such as halocarbons, as well as the presence of nitrogen or oxygen, can be detrimental to the control of the anisotropic etch. Under RF plasma conditions, the fluoride free radicals are typically in the form of CF3 or CF2.

Safety Requirements: The cryogenic liquid will rapidly boil to the gas at standard temperatures and pressures. The liquified gas can cause frostbite to any contaminated tissue. The main health hazard associated with release of this gas is asphyxiation by displacement of oxygen (see MSDS for further information).

99.2% CF4 Commerical Grade:

 CF4 Commercial Grade Maximum Impurities

Tetrafluoromethane

99.2%

Nitrogen + Oxygen

0.7%

Hexfluoroethane + Carbon Dioxide

0.1%

Mass Content of Water

< 1 ppm

Acidity

< 0.1 ppmw

 

99.99% CF4 High Purity Grade:

 CF4 High Purity Grade Maximum Impurities
Tetrafluoromethane
> 99.99%
Oxygen
< 5 ppm
Nitrogen
< 10 ppm
Carbon Dioxide + Carbon Monoxide
< 2 ppm
Other Halocarbons
< 2 ppm
Sulfur Hexafluoride
< 1 ppm
Moisture
< 2 ppm
Acidity (as Hydrogen Fluoride)
< 0.1 ppmw

 

 Cylinder Specifications

Contents

Pressure

Cylinder

Valve Outlet

Pounds

PSIG

BAR

40 cf.

CGA 580

12 lb.

2000

139

80 cf.

CGA 580

25 lb.

2000

139

220 cf.

CGA580

70 lb.

2000

139

99.999% CF4 Superior Purity Grade:

CF4 High Purity Grade Maximum Impurities
Tetrafluoromethane
> 99.999%
Oxygen + Argon
< 1 ppm
Nitrogen
< 4 ppm
Carbon Dioxide + Carbon Monoxide
< 1 ppm
Other Halocarbons
< 2 ppm
Sulfur Hexafluoride
< 1 ppm
Moisture
< 1 ppm
Acidity (as Hydrogen Fluoride)
< 0.1 ppmw

 

Appearance, Safety Requirements:

Compressed, colorless gas, non-flammable, non-explosive, has a moderate general toxic action in inhalation contact.

Physical Constants

Chemical formula

CF4

Molecular Weight

80.005

Specific volume @ +70°F (+21.1°C)

4.396 ft³/lb., 0274 m³/kg

Critical pressure

542.3. psia, 37.39 bar

Critical temperature

-50.17°F, -45.65°C

Specific gravity @ 70°F, 1 atm (Air=1)

3.04

Hazardous Class

2.2

Label

Nonflammable Gas

General Description

Colorless, Odorless

 

Downloads

CF4, Tetrafluoromethane Specifications pdf.

CF4 Tetrafluoromethane MSDS pdf.

In Stock and ready o ship worldwide: SF6 Gas global provider - Concorde Specialty Gases, Inc., 36 Eaton Road, Eatontown, NJ 07724 USA

Variety of Sizes in stock and ready for shipment:

5LB, 11LB, 18LB, 20LB, 25LB, 27.5LB, 35LB, 38LB, 45LB, 50LB, 57LB, 70LB, 90LB, 115LB and 1150LB. Custom Fill available upon request.

5KG, 10KG, 12.5KG, 40KG and 50KG. Custom Fill available upon request.


To learn more about our company, and its specialty gas products and services: click here to request a quotation, call 1-800-818-5109; or or use our Contact Form.

ConcordeTrak SF6 Gas Management and Reporting

Concorde Specialty Gases, Inc.
36 Eaton Road
Eatontown, NJ 07724

Toll Free: 1-800-818-5109
Tel: 732-544-9899
Fax: 732-544-9894

Concorde Provides:
SF6 Gas
C3F8 Gas (R-218)
CF4 Gas (R-14)
Neon Gas

Xenon Gas
Krypton Gas
Custom Gas Blends

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Concorde Special Gases Brochure

 

Concorde Gas Customer Pledge:

 

  • 100% Product Quality Warranty - Random testing by leading independent laboratories to ensure consistent product quality.
  • 100% Product Replacement Guarantee - If any Concorde Gas product fails to meet or exceed our published quality standards, we will provide a full replacement, including all shipping expenses.
  • Turnaround in One Business Day or Less - from order to shipment in the Continental US!
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Concorde Gas Services:

 

  • 60 Days Free Demurrage
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Concorde Specialty Gases, Inc., 36 Eaton Road, Eatontown, NJ 07724 USA